全息曝光系统中干涉条纹的稳定性直接影响光栅掩模质量。研究了参考干涉条纹的特性,提出一种光栅相位、倾斜度和周期的检测方法。为提高光栅曝光系统的稳定性,设计了一套全息光栅干涉条纹三维锁定系统。利用摄像机对参考干涉条纹进行检测,利用微电机和压电陶瓷对光路进行微调,可实现对光栅相位、倾斜度和周期的有效控制。实验结果表明,三维锁定系统可有效提高干涉条纹的稳定性,缩短光栅曝光前的静台稳定时间,提高光栅曝光对比度,可为大口径全息光栅曝光质量的提高提供技术支持。

The stability of interference fringes in a holographic exposure system directly affects the quality of grating masks. The characteristics of the reference interference fringes are investigated and the detection methods of phase, tilt, and period of the grating are obtained. A three-dimensional (3D) locking system is designed in order to improve the stability of this grating exposure system. The reference interference fringes are detected by a camera. The optical path is finely adjusted by the micro-motors and piezoelectric ceramics. The phase, tilt, and period of the grating are effectively controlled. The experimental results show that the 3D fringe locking system improves the stability of interference fringes, shortens the setup time before exposure, and further enhances the grating contrast, which is benificial for improving the quality of a large-aperture holographic grating.