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单晶金刚石飞秒激光加工的烧蚀阈值实验

Experiment on Ablation Threshold of Single Crystal Diamond Produced by Femtosecond Laser Processing

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摘要

采用不同功率的飞秒激光对单晶金刚石分别进行了单脉冲分离烧蚀实验和多脉冲累积烧蚀实验, 计算得到了单晶金刚石材料的单脉冲烧蚀阈值和多脉冲累积烧蚀阈值, 并研究了多脉冲作用下单晶金刚石烧蚀阈值的变化。结果表明:单晶金刚石的飞秒激光单脉冲烧蚀阈值为8.80 J/cm2; 随着有效脉冲数增加, 烧蚀阈值逐渐减小; 当有效脉冲数小于124时, 烧蚀阈值随有效脉冲数的增加而急剧减小; 当有效脉冲数增加到486后, 烧蚀阈值减小的趋势趋于平缓。有效脉冲数486、激光平均功率10.7 W是最优的激光加工工艺参数。

Abstract

Single-pulse separated ablation and multi-pulse cumulative ablation experiments are performed on single crystal diamond by femtosecond laser with different powers. The single-pulse ablation threshold and multi-pulse cumulative ablation threshold of single-crystal diamond materials are calculated, and the variation characteristics of ablation threshold of single-crystal diamond at multi-pulse are studied. The results show that the threshold of femtosecond laser ablation of single crystal diamond is 8.80 J/cm2. The ablation threshold of single crystal diamond materials decreases with the increase of effective pulse number. When the effective pulse number is less than 124, the ablation threshold decreases sharply with the increase of the effective pulse number. When the effective pulse number increases to 486, the decreasing trend of ablation threshold tends to be gentle. The optimum laser processing parameters are as follows: the effective pulse number is 486, and the laser average power is 10.7 W.

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中图分类号:TN249

DOI:10.3788/cjl201946.0402001

所属栏目:激光制造

基金项目:国家自然科学基金(51675172)、湖南省研究生科研创新项目(CX2017B082)

收稿日期:2018-11-07

修改稿日期:2018-12-13

网络出版日期:2018-12-24

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陈根余:湖南大学汽车车身先进设计制造国家重点实验室, 湖南 长沙 410082湖南大学激光研究所, 湖南 长沙 410082
朱智超:湖南大学汽车车身先进设计制造国家重点实验室, 湖南 长沙 410082湖南大学激光研究所, 湖南 长沙 410082
殷赳:湖南大学汽车车身先进设计制造国家重点实验室, 湖南 长沙 410082湖南大学激光研究所, 湖南 长沙 410082
熊彪:湖南大学汽车车身先进设计制造国家重点实验室, 湖南 长沙 410082湖南大学激光研究所, 湖南 长沙 410082
金梦奇:湖南大学汽车车身先进设计制造国家重点实验室, 湖南 长沙 410082湖南大学激光研究所, 湖南 长沙 410082

联系人作者:陈根余(hdgychen@163.com)

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引用该论文

Chen Genyu,Zhu Zhichao,Yin Jiu,Xiong Biao,Jin Mengqi. Experiment on Ablation Threshold of Single Crystal Diamond Produced by Femtosecond Laser Processing[J]. Chinese Journal of Lasers, 2019, 46(4): 0402001

陈根余,朱智超,殷赳,熊彪,金梦奇. 单晶金刚石飞秒激光加工的烧蚀阈值实验[J]. 中国激光, 2019, 46(4): 0402001

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