单晶锗是典型的红外光学晶体材料, 其加工表面的评价方法大都局限于面形精度, 而加工过程所产生的位错及晶面间距变化也会影响单晶锗的使用性能。为了全面地评价单晶锗加工后的表面性能, 通过表面粗糙度轮廓仪、 X射线衍射仪等设备, 对超精密车削的单晶锗平面及曲面进行了表面粗糙度和 X射线检测, 获得了针对单晶锗平面的表面粗糙度与位错密度相结合的性能评价方法, 及针对单晶锗曲面的表面粗糙度与晶面间距变化程度相结合的性能评价方法。相关研究对单晶锗在红外光学及其它领域的加工应用有重要意义。

Single-crystal germanium is a typical infrared optical crystal material. The evaluation methods of the processed surface are mostly focus on the surface accuracy, but the performance of single-crystal germanium can be affected by the dislocations generated in the processing and variation of the crystal plane spacing. In order to comprehensively evaluate the processed surface properties of single-crystal germanium, surface roughness and X-ray inspection of ultra-precision turned single-crystal planes and curved surfaces were carried out by means of a surface roughness measuring instrument, X-ray diffractometer, etc. Performance evaluation method for combining the surface roughness and dislocation density of single-crystal germanium plane and that for combining surface roughness and percentage change incrystal plane spacing of single-crystal germanium curved surface are obtained. Related research is of great significance for the processing of single-crystal germanium in infrared optics and other fields.