提出了一种基于光纤激光自准直转轴转角定位误差测量的方法, 建立了包含转轴运动误差以及安装误差的误差模型, 仿真分析了23项误差对转角定位误差测量的影响, 结果表明仅有参考转轴与待测转轴之间的4项安装误差的影响量与转轴旋转角度相关, 且只需精细调整其中两项角度安装误差即可保证影响量小于0.2″。利用所搭建的测量装置对某分度盘的转角定位误差进行了测量, 三次测量重复性偏差约为0.9″, 与光电自准直仪对比的最大偏差约为0.6″。结果表明: 利用该测量方法和测量装置可以实现转轴转角定位误差的全周范围高精度测量, 验证了所提出模型的有效性。

A measurement method for angular positioning error of a rotary axis based on fiber laser autocollimation was proposed. An error model was established including the motion errors of the rotary axis and the installation errors. By simulating and analyzing the impact of these 23 errors on measuring angular positioning error, the results showed that only four installation errors between the reference and the target rotary axes have influences depending on the rotation angle of the rotary axis. And only the two angular errors need to be made fine adjustments to insure that the influences were less than 0.2″. The angular positioning error of an indexing table was measured by the measuring device built. The repeatability value for measuring three times was about 0.9″, and the maximum comparison deviation from the optoelectronic autocollimator was about 0.6″. The results show that the angular positioning error of rotary axis can be measured high accurately with a full-circle measuring range by using the method and device, and the proposed model is verified.