提出一种硅基金字塔结构光控太赫兹波调制器。通过化学刻蚀方法在高阻硅基底形成微米级的金字塔结构, 研究该结构与高阻硅片对激光的反射率及对太赫兹的调制情况。实验表明, 金字塔结构可有效降低激光反射率, 提升激光利用率, 并且通过增加太赫兹波调制面积, 达到显著增强太赫兹波的调制效果, 其调制深度达到 90%以上。该硅基金字塔结构光控调制器可在极低的激光功率下工作, 具有宽带、大幅度调制的特点, 在太赫兹成像领域具有重要应用价值。

An optical pumping terahertz modulators based on silicon pyramid structure is presented. First the micro-scale pyramid structure is etched on high resistance silicon by chemical etching. Then the reflectivity and the terahertz modulation performance of the structure are studied experimentally. Experimental results indicate that pyramid structure can effectively reduce the reflectivity of laser, improve the utilization of laser and significantly increase the modulation depth by increasing the area of the terahertz wave modulation, and the modulation depth is above 90%. This modulator can work at very low laser power and has the characteristics of wide-band and large amplitude modulation, which has important application value in terahertz imaging and communication field.