光学 精密工程, 2019, 27 (3): 542, 网络出版: 2019-05-30   

大尺寸反射式光栅拼接技术的研究进展

Development of mosaic technology for large-size reflective gratings
作者单位
1 中国科学院 长春光学精密机械与物理研究所, 吉林 长春 130033
2 中国科学院大学, 北京 100049
摘要
大尺寸反射式光栅是提高天文光谱仪分辨率和啁啾脉冲放大系统输出能量的核心元件。随着天文和激光核聚变技术的发展, 大尺寸反射式光栅的研制已成为国内外学者研究的热点。相较于单块大尺寸反射式光栅的研制, 拼接法以其难度系数低、制作成本低和待拼接的小光栅易制作、质量高等优点成为了制作大尺寸反射式光栅的主要方法。本文介绍了大尺寸反射式光栅拼接技术的基本原理, 详细综述了光栅拼接技术的研究进展, 包括光栅拼接误差检测理论、光栅拼接误差分离、拼接光栅波前相位校正、光栅拼接误差维数的削减和光栅拼接装置, 最后总结了光栅拼接技术的优缺点并指出了其未来的发展方向。
Abstract
Large-size reflective grating is the core element for improving both the resolution of astronomical spectrometers and the output energy of chirp-pulse amplification systems. With the development of astronomy and laser fusion, the fabrication of large-size reflective gratings has become a hot topic for scholars both domestically and internationally. Compared to the fabrication of a single large-size reflective grating, the mosaic method has become the primary method of fabricating large-size reflective gratings, as it has the advantages of a low difficulty coefficient, low production cost, easy fabrication, and high quality of small gratings to be mosaicked. In this study, the basic principles of large-size reflective grating mosaic technology are introduced, and the research progress of grating mosaic technology is summarized in detail. More specifically, this study considers the theory of grating mosaic error detection, the separation of grating mosaic error, the phase correction of the wavefront of mosaic grating, the reduction of the dimension of grating mosaic error, and the grating mosaic device. Finally, the advantages and disadvantages of grating mosaic technology and directions for future development are summarized.

杨国军, 齐向东, 于海利, 李晓天, 张善文, 糜小涛, 于宏柱. 大尺寸反射式光栅拼接技术的研究进展[J]. 光学 精密工程, 2019, 27(3): 542. YANG Guo-jun, QI Xiang-dong, YU Hai-li, LI Xiao-tian, ZHANG Shan-wen, MI Xiao-tao, YU Hong-zhu. Development of mosaic technology for large-size reflective gratings[J]. Optics and Precision Engineering, 2019, 27(3): 542.

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