光子学报, 2019, 48 (6): 0616004, 网络出版: 2019-07-10   

低能Kr+离子束诱导蓝宝石晶体实验研究

Experimental Research on Sapphire Crystal Induced by Low Energy Kr+ Ion Beam
作者单位
西安工业大学 光电工程学院, 陕西省薄膜技术与光学检测重点实验室, 西安 710021
摘要
使用微波回旋共振离子源制备蓝宝石(A向)自组织纳米结构, 研究不同入射角度下Kr+离子束刻蚀蓝宝石表面形成的自组织纳米结构及其形成过程.采用等离子体与离子束刻蚀设备在不同入射角度下对蓝宝石样品表面进行刻蚀并通过Taylor Surf CCI2000非接触式表面测量仪和原子力显微镜分别对刻蚀后的蓝宝石样品的刻蚀速率及表面形貌进行分析.研究表明: 当离子束能量为400 eV,加速电压为200 V,离子束流密度为310 μA/cm2时, 小角度入射下, 蓝宝石样品表面出现纵向尺度较小的有序点状纳米结构; 随着入射角度的增加, 样品表面形成条纹状纳米结构, 30°时形成短程有序且纵横比为0.87的条纹状结构; 入射角度继续增加, 纵向高度减小直至纳米结构消失; 当角度达到60°附近, 蓝宝石表面又出现条纹状结构, 70°时形成了短程有序且纵横比为1.07的条纹状结构.自组织纳米结构的形成先以“岛状”形式出现, 随后岛上生长出条纹状纳米结构, 随着刻蚀时间的增加, 岛状条纹结构纵向尺度增大且有序性增强, 纳米结构的横向周期不变.
Abstract
Electron cyclotron resonance ion source has been employed to erode the surface of sapphire (crystal orientation A) and the self-organized nanostructures induced by Kr+ ion beam on sapphire surface at different incident angles are researched. The surface of the sapphire sample was etched at different incident angles using a plasma and ion beam etching equipment. The etching rate and surface morphology of the sapphire samples were analyzed by Taylor Surf CCI2000 non-contact surface measuring instrument and atomic force microscope. The experimental results indicate that, with the ion beam energy 400 eV, the accelerator voltage 200 V, and beam current density 310 μA/cm2, the ordered punctate nanostructures with small longitudinal dimension appear on the surface of the sapphire sample at small angle incidence; the increase of incident angle will obtain stripe-like nanostructure on the sample surfaces; when the incident angle continues to increase up to 30°, short-range order and stripe-like structures appear on sample surfaces with an aspect ratio of 0.87; the incident angle continues to increase and the vertical height decreases until the nanostructures disappear; when the angle reached 60°, stripe-like structures appear on sample surfaces again, and at 70°, short-range order and stripe-like structures with an aspect ratio of 1.07 are formed. The formation of self-organized nanostructures first appear in the form of "island", and then the stripe-like nanostructures are grown on the island. Eroding time extension is unable to change nanostructure topographies, but able to increase the vertical nanostructure dimensions and enhance the orderliness.

费芒芒, 陈智利, 刘卫国, 刘雨昭, 惠迎雪. 低能Kr+离子束诱导蓝宝石晶体实验研究[J]. 光子学报, 2019, 48(6): 0616004. FEI Mang-mang, CHEN Zhi-li, LIU Wei-guo, LIU Yu-zhao, XI Ying-xue. Experimental Research on Sapphire Crystal Induced by Low Energy Kr+ Ion Beam[J]. ACTA PHOTONICA SINICA, 2019, 48(6): 0616004.

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