针对GaAs基和InP基材料的波长可调谐垂直腔面发射激光器(VCSEL)中微机电系统(MEMS)应力集中引起结构损坏的问题开展研究。设计了蝴蝶结状MEMS悬臂结构, 在保证最大位移不变的情况下, 降低了悬臂固定端所受的米塞斯应力, 提高了器件的可靠性。采用COMSOL软件对蝴蝶结状悬臂结构的各项参数对力学特性的影响进行了优化与分析。结果表明: 优化后的蝴蝶结状MEMS悬臂结构固定端的最大米塞斯应力相比于等截面状悬臂结构最大降低了64%, 对于GaAs基材料的蝴蝶结状MEMS波长可调谐VCSEL自由光谱范围可达45 nm。

The structural damage caused by micro-electro-mechanical system(MEMS) stress concentration in tunable vertical cavity surface emitting lasers(VCSEL) of GaAs-based and InP-based materials was studied. A bowknot MEMS cantilever structure was designed to reduce the von Mises stress at the fixed end of the cantilever and ensure the reliability of the device while ensuring the maximum displacement was invariable. The COMSOL software was used to optimize and analyze the influence of various parameters of the bowknot cantilever structure on the mechanical properties. The results show that the maximum von Mises stress at the fixed end of the optimized bowknot MEMS cantilever structure is reduced by 64% compared to the equal-section cantilever structure. The free spectral range of a bowknot MEMS wavelength-tunable VCSEL for GaAs-based materials is up to 45 nm.