针对彩膜小尺寸高分辨率平板电脑产品的曝光基台色斑(Stage Mura)不良, 对异常区域各项特性进行分析, 发现Mura区域的黑矩阵(BM)的关键线宽(CD)和坡度角形貌与正常区存在异常。推测原因为曝光时,不良区域与正常区域曝光温度和曝光间隙存在差异, 并进行试验验证。将曝光温度和曝光间隙进行调整试验后, 使用扫描电子显微镜(SEM)分析黑矩阵关键线宽(BM CD)和坡度角, 确认改善措施能减少正常区域和Mura区域BM CD和坡度角差异, 不良发生率由72%降低为1.4%。进一步调整BM膜厚, 从整体上弱化正常区域和Mura区域的透过率差异, 最终基台色斑不良率降低至0.7%。

As for the exposure stage Mura in small size and high PPI(Pixel Per Inch) TPC(Tablet Personal Computer) color filter product, it was found that the black matrix(BM) critical dimension(CD) and tape angle in Mura area are different from good area through the characteristic analysis. The reasons were supposed to be the difference of the temperature and gap between Mura area and good area during exposure process and were verified through experiments. After adjusting the exposure temperature and gap, the BM CD and Tape Angle were observed by scanning electron microscope(SEM) and it was found the difference between Mura area and good area were diminished. The stage Mura defect ratio decreases from 7.2% to 1.4% by the adjustment. Furthermore, to diminish the transmittance gap between Mura area and good area in general, the BM thickness is adjusted and the stage Mura defect ratio decreases to 0.6% finally.