光谱学与光谱分析, 2019, 39 (8): 2341, 网络出版: 2019-09-02  

氩气压力对螺旋波放电影响的发射光谱诊断及仿真研究

Emission Spectroscopy Diagnosis and Simulation Study of Argon Pressure Effect on Helicon Wave Discharge
作者单位
1 空军工程大学等离子体动力学重点实验室, 陕西 西安 710038
2 空军工程大学航空机务士官学校, 河南 信阳 464000
3 四川大学空天科学与工程学院, 四川 成都 610065
摘要
螺旋波等离子体源以其高电离效率与高密度优势受到多个领域的青睐。 螺旋波放电高电离效率的机理或者功率耦合模式, 一直是困扰该领域学者的难点之一, 对于放电过程与特性的诊断则是揭示其物理机制的重要途径。 光谱诊断能够克服介入式诊断手段对等离子体的干扰同时受等离子体烧蚀等弊端, 且响应速度快、 操作灵活。 为研究螺旋波等离子体的放电特性以及气体压力的影响, 开展了以氩气为工质气体的光谱实验研究, 并针对实验开展了Helic程序数值模拟。 通过改变光纤探头焦距调整径向诊断位置, 得到谱线强度的径向分布。 由氩原子4p-4s能级跃迁产生的谱线主要集中在740~920 nm区间, 谱线相对强度较离子激发谱线较强。 实验研究发现, 在较低氩气压力范围(0.2 Pa
Abstract
Helicon plasma sources have gradually been widely adopted in various research fields due to their high ionization efficiency and high density. Lacking in understanding of the mechanism for the high ionization efficiency and the power coupling mode of helicon discharge has been a great challenge for scholars to deal with in this field. To diagnose the discharge process and the characteristics is an important way to reveal its physical mechanism. Spectral diagnosis can avoid the interference of contact measurements on plasma and is free from plasma ablation. It responds quickly and is flexible to operate. In order to study the discharge characteristics of helicon plasma and the influence of gas pressure, researches on emission spectral diagnosis of argon discharge and numerical simulation of the Helic code for these experiments were conducted. The radial profiles of the line intensity were obtained by changing the focal length of the fiber optic probe to adjust the radial diagnostic position. Atomic emission lines of argon are mainly concentrated in the 740~920 nm region, which are generated by the transition of argon atoms between the 4p-4s energy levels and stronger than the relative intensity of ion lines. It can be found that at lower pressure ranges (0.2 Pa

段朋振, 李益文, 张百灵, 魏小龙, 苌磊, 赵伟灼. 氩气压力对螺旋波放电影响的发射光谱诊断及仿真研究[J]. 光谱学与光谱分析, 2019, 39(8): 2341. DUAN Peng-zhen, LI Yi-wen, ZHANG Bai-ling, WEI Xiao-long, CHANG Lei, ZHAO Wei-zhuo. Emission Spectroscopy Diagnosis and Simulation Study of Argon Pressure Effect on Helicon Wave Discharge[J]. Spectroscopy and Spectral Analysis, 2019, 39(8): 2341.

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