Matter and Radiation at Extremes, 2019, 4 (4): 045403, Published Online: Nov. 8, 2019  

Thickness dependence of microstructure and properties in Be2C coatings as a promising ablation material

Author Affiliations
1 Research Center of Laser Fusion, Chinese Academy of Engineering Physics, Mianyang 621900, China
2 Science and Technology on Plasma Physics Laboratory, Mianyang 621900, China
3 IFSA Collaborative Innovation Center, Shanghai Jiao Tong University, Shanghai 200240, China
Abstract
Beryllium carbide (Be2C) thin films have proven to be promising ablation materials, but the properties of Be2C coatings of the greater thickness required for inertial confinement fusion capsules are still unknown. In this work, Be2C coatings of various thicknesses (0.3–32.9 μm) are prepared by DC reactive magnetron sputtering. The influence of thickness on crystal properties, microstructure, and optical properties is investigated. The results indicate that the crystallinity of polycrystalline Be2C films improves with increasing thickness, while the grain size (~5 nm) and texture properties (without a preferred orientation) have only a weak dependence on thickness. A uniform featureless microstructure and smooth surface (root mean square roughness ~8 nm) are observed even in thick (32.9 μm) films, despite the presence of defects induced by contaminants. High densities (2.19–2.31 g/cm3) and high deposition rates (~270 nm/h) are realized, with the latter corresponding to the upper limit for the fabrication of Be2C coatings by magnetron sputtering. The transmittance of the films in the near-infrared region remains at a high level (>80%) and has only a weak dependence on thickness, while the transmittance in the visible region decreases with increasing thickness. In addition, the optical bandgap is estimated to be about 1.9 eV and decreases with increasing thickness owing to the presence of defects.

Yudan He, Lei Jin, Jiqiang Zhang, Bingchi Luo, Kai Li, Weidong Wu, Jiangshan Luo. Thickness dependence of microstructure and properties in Be2C coatings as a promising ablation material[J]. Matter and Radiation at Extremes, 2019, 4(4): 045403.

引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!