提出了一种扫描白光干涉法, 用于获取LCOS芯片的相位调制特性曲线并对其进行相位校准, 而且实现了对LCOS芯片建立的相位光栅的像素级相位分析.将补偿玻璃平板紧贴于参考镜处, 克服了白光短相干长度的限制, 提高了干涉条纹间的对比度.利用Morlet小波变换法求取白光干涉信号包络曲线的峰值点进行相位值重构, 实现了0.01π的相位测量精度, 同时保证了横向分辨率为0.79 μm.利用Logistics函数对相位调制幅度为2π的二元光栅相位轮廓进行拟合, 得到其相位回程区宽度为11.49 μm.小像素LCOS芯片构建的闪耀光栅存在相位线性增长区和相位回程区.周期为40 μm的闪耀光栅相位回程区宽度为8.81 μm, 其衍射效率为71.9%.对不同周期的闪耀光栅的相位轮廓进行分析, 结果表明：闪耀光栅的周期越小, 相位回程区相对宽度越大, 衍射效率降低.

An improved Michelson white light scanning interferometry is demonstrated to be used to aquire the phase modulation characterization of the LCOS device and correct the gamma curve, and the phase profile of the phase gratings on the LCOS device can be observed in the pixel level. With a compensatory glass flat attached to the reference mirror, the limitation of the tiny coherent length of the white light is overcome and the contrast of the interference fringes is improved. Using the Morlet wavelet transform method to obtain the peak point of the envelope curve of the white light interference signals to reconstruct the phase profile, the actual phase resolution is 0.01π, and the horizontal resolution is 0.79 μm. Using the Logistics fuction to fit the phase profile of the binary grating which the phase modulation depth is 2π, the width of the flyback region is 11.49 μm. The linear phaseslope region and the flyback region are including in the blazed grating on the LCOS device with small pixels. The width of the flyback region is 8.81 μm and the diffraction efficiency is calculated to be 71.9% in the blazed grating whose period is 40 μm. Analyzing the blazed gratings with different periods, the result shows that the relative width of the flyback region is broadened and the diffraction efficiency is decreased with the smaller period of the blazed grating.