红外与激光工程, 2019, 48 (9): 0919001, 网络出版: 2019-10-12
蝶形天线增强的InP基室温HEMT太赫兹探测器研究
Research on InP-based HEMT terahertz detector enhanced by bow-tie antenna at room temperature
太赫兹探测器 高电子迁移率场效应晶体管 磷化铟 蝶形天线 分子束外延 terahertz detector HEMT InP bow-tie antenna excellent beam quality
摘要
采用分子束外延技术制备了InP基HEMT样片,室温下样片迁移率达10 289 cm2/(V·s)。通过光刻、腐蚀、磁控溅射、点焊等工艺技术制备出了蝶形天线耦合的太赫兹探测器件。器件采用的蝶形天线经HFSS软件仿真优化后,天线S11参数为-40 dB,电压驻波比(VSWR)为1.15,增益可达6 dB,并与二维电子气沟道实现阻抗匹配。在VDI公司0.3 THz肖特基二极管太赫兹源辐照下进行器件测试,测试结果表明,室温下器件噪声等效功率(NEP)为40 nW/Hz1/2,探测响应度46 V/W,器件响应时间优于330 μs。
Abstract
InP-based HEMT samples were prepared by molecular beam epitaxy(MBE). The sample mobility at room temperature reached 10 289 cm2/(V·s). The terahertz detector coupled with a bow-tie antenna was fabricated by photolithography, etching, magnetron sputtering, spot welding. The bow-tie antenna used in the device was optimized by simulation with HFSS, so that the optimized antenna parameter of S11 was -40 dB, the voltage standing wave ratio(VSWR) was 1.15, gain was 6 dB and impedance matching with the two-dimensional electronic gas(2DEG) channel. The device was measured by VDI′s 0.3 THz Schottky diode terahertz source. The measurement results show that the device noise equivalent power (NEP) is 4 nW/Hz1/2 at room temperature, and the detection response rate is 46 V/W, the device response time is better than 330 μs.
李金伦, 崔少辉, 张静, 张振伟, 张博文, 倪海桥, 牛智川. 蝶形天线增强的InP基室温HEMT太赫兹探测器研究[J]. 红外与激光工程, 2019, 48(9): 0919001. Li Jinlun, Cui Shaohui, Zhang Jing, Zhang Zhenwei, Zhang Bowen, Ni Haiqiao, Niu Zhichuan. Research on InP-based HEMT terahertz detector enhanced by bow-tie antenna at room temperature[J]. Infrared and Laser Engineering, 2019, 48(9): 0919001.