对于硅上液晶(Liquid Crystal on Silicon,LCoS)器件而言, 由于其像素间距较小, 当某一像素施加电压后, 会影响其相邻不加电压的像素的光学特性。为了改善这一情况, 本文通过建立一种常白型LCoS的三维光学模型, 研究了3种参数对相邻不加电像素边缘的影响。结果表明: (1)相邻像素边缘暗态的位置和面积会随着液晶分子取向的改变而改变, 当液晶分子取向方向为45°时, 相邻像素边缘受影响的程度最小; (2)液晶盒的厚度越大, 相邻像素边缘受影响的程度越大; (3)像素间距对相邻像素边缘的影响是变化的。本文条件下, 当像素间距为0.7 μm时, 加电的中央像素对周围像素的反射率的影响最小。本研究的结论对高分辨率LCoS的设计和制备具有一定的指导意义。

In terms of liquid crystal on silicon (LCoS) device, the optical properties of off-state pixels would be affected by the adjacent on-state pixel, because the distance between the adjacent pixels is small. To improve this issue, a three-dimensional (3D) optical modeling based on the normally white LCoS mode is built to investigate the effects of three parameters on the adjacent pixels’ optical properties. As a result, (1) the position and area of dark zone on the edge of adjacent pixels change with the initial liquid crystal director. The least influence can be obtained for the adjacent pixels, when the initial liquid crystal director is 45°. (2) The thicker the LCD cell is, the greater the influence on the adjacent pixels is. (3) The influence of pixels’ gap on the edges of adjacent pixels are varying. In this work, as the pixels’ gap is 0.7 μm, the on-state central pixel has the least influence on the reflectivity of the adjacent pixels. This investigation has a certain guiding significance for the design and preparation of high resolution LCoS.