Photonic Sensors, 2019, 9 (4): 344, 网络出版: 2019-12-05  

Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography

Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography
作者单位
National Engineering Research Centre for Diffraction Gratings Manufacturing and Application, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Jilin 130033, China
摘要
Abstract
To obtain a good interference fringe contrast and high fidelity, an automated beam iterative alignment is achieved in scanning beam interference lithography (SBIL). To solve the problem of alignment failure caused by a large beam angle (or position) overshoot exceeding the detector range while also speeding up the convergence, a weighted iterative algorithm using a weight parameter that is changed linearly piecewise is proposed. The changes in the beam angle and position deviation during the alignment process based on different iterative algorithms are compared by experiment and simulation. The results show that the proposed iterative algorithm can be used to suppress the beam angle (or position) overshoot, avoiding alignment failure caused by over-ranging. In addition, the convergence speed can be effectively increased. The algorithm proposed can optimize the beam alignment process in SBIL.

Ying SONG, Bayanheshig, Shuo LI, Shan JIANG, Wei WANG. Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography[J]. Photonic Sensors, 2019, 9(4): 344. Ying SONG, Bayanheshig, Shuo LI, Shan JIANG, Wei WANG. Piecewise Linear Weighted Iterative Algorithm for Beam Alignment in Scanning Beam Interference Lithography[J]. Photonic Sensors, 2019, 9(4): 344.

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