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调控矢量激光场在表面处理中的应用研究

Application of the manipulated vectorial laser field in surface treatment

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摘要

为了研究调控矢量激光场在表面处理中的应用, 基于Nd∶YAG脉冲调Q激光器, 搭建了矢量调控模块, 采用选取钛合金和单晶硅进行激光烧蚀打孔实验的方法, 对柱对称矢量激光的脉冲次数、光束的偏振态和拓扑荷数对激光表面处理的影响进行了系统研究。结果表明, 激光脉冲次数对孔的影响主要集中在孔深和孔径, 光束偏振态主要影响孔的圆度和光洁度, 拓扑荷数则影响孔底和孔周的光洁度。调控矢量激光作为一种特殊激光, 有望在优良材料加工和处理领域获得广泛应用。

Abstract

In order to study application of the manipulated vector laser field in surface processing, based on Nd∶YAG pulse Q-switched laser, vector control module was built. Laser ablation drilling experiments on titanium alloy and silicon was used to study effect of pulse number of cylindrical symmetric vector laser, the polarization of beam and the topological charge on laser surface treatment. The results show that the influence of laser pulse number on hole is mainly concentrated on hole depth and aperture. The polarization of beam mainly affects the roundness and smoothness of the hole. Topological loads affect the smoothness of the bottom and periphery of the hole. As a special kind of laser, the manipulated vector laser is expected to be widely used in the field of fine material processing.

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中图分类号:O439

DOI:10.7510/jgjs.issn.1001-3806.2020.01.006

所属栏目:激光与光电子技术应用

基金项目:国家自然科学基金资助项目(61875086);航空科学基金资助项目(2016ZD52042);中央高校基本科研业务费专项资金资助项目(2016072)

收稿日期:2019-03-25

修改稿日期:2019-05-28

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作者单位    点击查看

张云芝:南京航空航天大学 理学院 应用物理系, 南京 211106
王吉明:南京航空航天大学 理学院 应用物理系, 南京 211106
路元刚:南京航空航天大学 理学院 应用物理系, 南京 211106
吴 彤:南京航空航天大学 理学院 应用物理系, 南京 211106
赫崇君:南京航空航天大学 理学院 应用物理系, 南京 211106
顾晓蓉:南京航空航天大学 理学院 应用物理系, 南京 211106
刘友文:南京航空航天大学 理学院 应用物理系, 南京 211106

联系人作者:王吉明(jimingw@nuaa.edu.cn)

备注:张云芝(1993-), 女, 硕士研究生, 现主要从事矢量光学和激光材料加工的研究。

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引用该论文

ZHANG Yunzhi,WANG Jiming,LU Yuangang,WU Tong,HE Chongjun,GU Xiaorong,LIU Youwen. Application of the manipulated vectorial laser field in surface treatment[J]. Laser Technology, 2020, 44(1): 32-36

张云芝,王吉明,路元刚,吴 彤,赫崇君,顾晓蓉,刘友文. 调控矢量激光场在表面处理中的应用研究[J]. 激光技术, 2020, 44(1): 32-36

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