当前主流显示技术存在着显示功耗偏高的问题, 基于MEMS辅助的显示由于可以取消偏光片和彩色滤光片的使用, 更适合于户外、低功耗类的应用。为了将基于MEMS辅助的显示器大规模制造, 将液晶显示工艺与基于MEMS辅助的显示进行材料和工艺的匹配意义重大。本文对MEMS与液晶显示加工工艺进行系统介绍, 同时分析了3种主流基于MEMS辅助的显示模式, 详细阐述了将现行规模生产 下的液晶显示工艺应用于这些基于MEMS辅助的显示技术所做的一些工作和研究进展, 并探讨了基于MEMS辅助的显示技术的发展趋势。

The mainstream TFT-LCD devices have the problem of high power consumption. On account of canceling the use of polarizer and color filter, the MEMS based display is more suitable for low power applications. For mass manufacturing of MEMS displays, it is significant to match TFT-LCD with MEMS based display, including material and process. This paper systematically introduces the MEMS and TFT-LCD process, analyzes three main display modes based on MEMS. Some work and research progress of applying low cost TFT LCD technology to these MEMS based display technologies are described in detail. The development trend of MEMS based display technology is also discussed.