光栅是光栅光谱仪的核心部件, 其分光能力直接决定了仪器的光谱分辨率。基于浸没式光栅的光栅光谱仪使用浸没式光栅作为分光元件。推导了浸没式光栅的光谱分辨率方程, 光谱分辨率要求一定时, 与使用普通反射光栅相比, 使用浸没式光栅能够在实现高光谱分辨率的同时大幅减小仪器的体积和重量。介绍了浸没式光栅的常用材料、浸没式光栅在星载和地基高光谱分辨率光栅光谱仪上的应用以及浸没式光栅的制作方法。设计和研制了70 mm硅浸没式光栅, 实测光栅效率>57%、光栅偏振<3.2%, 各项指标实测结果满足技术要求。

The grating is the core component of the grating spectrometer. The dispersion ability of the grating determines the spectral resolution of the spectrometer directly. The spectrometer based on the immersed grating uses the immersed grating as the dispersion component. The equation of the spectral resolution of the immersed grating is derived. With the same requirement of the spectral resolution, comparing the immersed grating with the ordinary reflection grating, using the immersed grating can realize high spectral resolution while greatly decreasing the volume and the weight of the spectrometer. The material of the immersed grating, the applications of the immersed grating in spaceborne and ground-based high spectral resolution spectrometers, and the manufacturing methods of the immersed grating are introduced. A 70 mm silicon immersed grating was designed and developed. The measured grating efficiency is >57%, the measured grating polarization is <3.2%, and the test results of all specifications meet the technical requirements.