光学与光电技术, 2020, 18 (5): 16, 网络出版: 2021-01-14
一种光场均匀性同步采集方案的 FPGA实现
AnFPGAImplementationSchemeofLightFieldUniformityData SynchronousAcquisition
光场均匀性 光刻机 同步采集 现场可编程门阵列 uniformityoflightfield lithographymachine synchronousacquisition fieldprogrammablegatearray
摘要
提出了一种基于 FPGA的光场均匀性测量同步采集方案。在大面积光场均匀性测量中,探头步进扫描法需要对大面积光场进行扫描,因此需要同时对光场测量点的光能量值及其坐标值进行采集。该方案通过设计同步采集电路对光场测量点的能量值及三维坐标进行同步采集,并保证了数据的一一对应,实现光脉冲能量和三维坐标的同步自动化采集。通过构建测试平台对光场均匀性测量同步采集方案进行测验,实验结果证明了同步采集方案的可行性和实用性。
Abstract
AdatasynchronousacquisitionschemeoflightfielduniformitymeasurementbasedonFPGAisproposed.Inthe measurement of the uniformity of large-area light field,the probe step scanning method needs to scan the large-area light field,soitisnecessarytocollectboththelightenergyvalueanditscoordinatevalueofthelightfield.Theenergyvalueand three-dimensionalcoordinatesofthelightfieldmeasurement pointsaresynchronouslycollectedbydesigning asynchronous acquisition circuit in this scheme,and the one-to-one correspondence of the data is ensured. So that the synchronous automaticacquisitionof thelightpulse energyandthree-dimensionalcoordinatesisrealized. By theconstructionof the test platform,thesynchronousacquisitionschemeoflightfielduniformitymeasurementistested.Theexperimentalresultsshow thatthesynchronousacquisitionschemeisfeasibleandpractical.
王景隆, 曹益平, 杨磊. 一种光场均匀性同步采集方案的 FPGA实现[J]. 光学与光电技术, 2020, 18(5): 16. WANGJing-long, CAOYi-ping, YANGLei. AnFPGAImplementationSchemeofLightFieldUniformityData SynchronousAcquisition[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2020, 18(5): 16.