中国激光, 2020, 47 (3): 0302003, 网络出版: 2020-03-12   

透明脆性材料的bottom-up激光高速钻孔 下载: 889次

Bottom-Up Drilling of Transparent Materials
作者单位
1 英诺激光科技股份有限公司, 广东 深圳 518000
2 江苏微纳激光应用技术研究院有限公司, 江苏 常州 213000
摘要
与传统的激光钻孔不同,透明材料的bottom-up钻孔是将激光穿过材料,聚焦于材料的下表面,由底部一层一层地将材料向上去除。基于不同脉宽的激光,探讨了玻璃材料bottom-up钻孔的机理。结果表明:除了超短脉冲激光外,纳秒激光亦可以实现bottom-up钻孔,而且更容易实现零锥度钻孔;bottom-up钻孔效率随脉宽减小而降低,2 ns~50 ps激光的切割效率比超快激光高,此结果不同于常用的top-down加工的结果,文中亦尝试对此现象进行了解释。
Abstract
Unlike traditional laser drilling, the bottom-up drilling of transparent materials involves passing the laser through the material, focusing on the lower surface of the material, and removing the material from the bottom to the top layer by layer. Based on lasers with different pulse widths, this study investigates the mechanism of bottom-up drilling of glass materials. It is found that in addition of ultrashort pulse laser, the nanosecond laser can also achieve bottom-up drilling. Furthermore, it can achieve zero taper drilling. The efficiency of bottom-up drilling decreases with the decrease of pulse width, and the cut efficiency of lasers with pulse width from 2 ns to 50 ps is still higher than that of ultrafast laser. This result differs from the result of general top-down processing, which is attempted to be explained herein.

王晧智, 郭鹏峰, 吴双, 陶沙, 陈蔚, 赵晓杰. 透明脆性材料的bottom-up激光高速钻孔[J]. 中国激光, 2020, 47(3): 0302003. Wang Haozhi, Guo Pengfeng, Wu Shuang, Tao Sha, Chen Wei, Zhao Xiaojie. Bottom-Up Drilling of Transparent Materials[J]. Chinese Journal of Lasers, 2020, 47(3): 0302003.

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