Photonics Research, 2020, 8 (6): 06000912, Published Online: May. 19, 2020
Design and fabrication of a SiN-Si dual-layer optical phased array chip Download: 1143次
Abstract
A SiN-Si dual-layer optical phased array (OPA) chip is designed and fabricated. It combines the low loss of SiN with the excellent modulation performance of Si, which improves the performance of Si single-layer OPA. A novel optical antenna and an improved phase modulation method are also proposed, and a two-dimensional scanning range of is achieved, which makes the OPA chip more practical.
Pengfei Wang, Guangzhen Luo, Yang Xu, Yajie Li, Yanmei Su, Jianbin Ma, Ruiting Wang, Zhengxia Yang, Xuliang Zhou, Yejin Zhang, Jiaoqing Pan. Design and fabrication of a SiN-Si dual-layer optical phased array chip[J]. Photonics Research, 2020, 8(6): 06000912.