采用离子注入方法在氢化物气相外延法生长的AlN薄膜中注入了不同剂量的Dy³⁺和Eu³⁺，制备了Dy³⁺单掺、Dy³⁺和Eu³⁺共掺的AlN样品.对于Dy³⁺单掺杂AlN样品，X射线衍射和拉曼散射实验结果表明随着Dy注入剂量的增加，样品的压应力也增加，形成了比较明显的损伤层；但当注入剂量由5×10¹⁴ at/cm²增加至1×10¹⁵ at/cm²时，压应力增加不明显，接近于饱和.对于Dy³⁺和Eu³⁺共掺的AlN样品，阴极荧光实验表明，AlN中Eu³⁺和Dy³⁺之间可能存在能量传递，能量传递途径为在声子辅助下从Dy³⁺的⁴F_9/2→⁶H_15/2至Eu³⁺的⁷F₀→⁵D₂的共振能量传递.此外，计算发现改变Dy³⁺和Eu³⁺离子的注入剂量比能实现发光色度坐标和色温的有效调控.

Dy³⁺ and Eu³⁺ ions with different doses were implanted into AlN thin films grown by hydride vapor phase epitaxy method. For Dy doped AlN, results of X-ray diffraction and Raman scattering show that the compressive stress of the sample increases with the increase of Dy³⁺ dose. When the Dy³⁺ dose increases from 5×10¹⁴ at/cm² to 1×10¹⁵ at/cm², the compressive stress of samples is close to saturation. For Dy³⁺ and Eu³⁺ co-doped AlN, according to the cathodoluminescence spectra, a possible energy transfer process between Dy³⁺ and Eu³⁺ is proposed. In addition, through changing the dose ratio of Dy³⁺ respect to Eu³⁺ ions, the chromaticity coordinates and color temperatures of Dy³⁺ and Eu³⁺ co-doped AlN can be effectively regulated.