Photonics Research, 2020, 8 (3): 03000257, Published Online: Feb. 10, 2020  

Mid-infrared waveguiding in three-dimensional microstructured optical waveguides fabricated by femtosecond-laser writing and phosphoric acid etching Download: 530次

Author Affiliations
1 Institute of Microscale Optoelectronics, Shenzhen University, Shenzhen 518052, China
2 School of Physics, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China
3 Departamento Física Aplicada, Facultad Ciencias, Universidad de Salamanca, Salamanca 37008, Spain
Abstract
We fabricated a three-dimensional microstructured optical waveguide (MOW) in a single-crystal using the femtosecond-laser writing and phosphoric acid etching techniques, and observed excellent midinfrared waveguiding performance with low loss of 0.5 dB/cm. Tracks with a periodic arrangement were written inside the yttrium aluminum garnet (YAG) crystal via femtosecond laser inscription, and then etched by the phosphoric acid (H3PO4) to form the hollow structures. The evolution of the microstructure of tracks was investigated in detail. The function of the MOW was analyzed by different numerical methods, indicating the proposed MOW can effectively operate in quasi-single-mode pattern in the midinfrared wavelength range, which agrees well with our experiment results.

Jinman Lv, Binbin Hong, Yang Tan, Feng Chen, Javier Rodríguez Vázquez de Aldana, Guo Ping Wang. Mid-infrared waveguiding in three-dimensional microstructured optical waveguides fabricated by femtosecond-laser writing and phosphoric acid etching[J]. Photonics Research, 2020, 8(3): 03000257.

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