激光与光电子学进展, 2020, 57 (11): 111417, 网络出版: 2020-06-02
飞秒激光非金属微孔加工研究进展 下载: 2061次特邀综述
Research Progress of Femtosecond Laser Microhole Drilling on Non-Metallic Materials
激光技术 飞秒激光 非金属微孔 整形脉冲 加工环境 laser technique femtosecond laser non-metallic microhole shaped pulse machining environment
摘要
微孔作为一种常见结构,已被广泛应用于航空、生物、化工、新能源等领域。飞秒激光具有的超短脉冲宽度和超强峰值功率使其在高质量、高深径比微孔加工方面独具优势。综述了近年来飞秒激光非金属微孔加工方法及其应用的研究进展,包括飞秒激光时域/空域整形的电子动态调控微孔加工、飞秒激光辐照辅助化学刻蚀微孔加工、真空环境微孔加工、后表面液体辅助微孔加工以及控制环境温度微孔加工等,并分析了飞秒激光非金属微孔加工在机理以及工艺等方面面临的挑战。
Abstract
Microholes are extensively used as a common structure in various fields, including aviation, biology, chemical industry, and new energy. The femtosecond laser pulse possesses unique advantages with respect to drilling high-quality and high-aspect-ratio microholes owing to its ultrashort duration and ultrahigh peak intensity. In this study, the research progress of femtosecond laser microhole drilling on non-metallic materials and its applications in recent years, including the temporally/spatially shaped femtosecond laser pulse microhole drilling based on electron dynamic control, laser irradiation followed by chemical etching microhole drilling, vacuum environment microhole drilling, back-surface liquid-assisted microhole drilling, and environment-temperature-controlled microhole drilling, are reviewed. Furthermore, the challenges associated with the mechanisms and methodologies of femtosecond laser microhole drilling on non-metallic materials are analyzed.
杜坤, 李晓炜, 杨炳东, 张超, 夏博. 飞秒激光非金属微孔加工研究进展[J]. 激光与光电子学进展, 2020, 57(11): 111417. Kun Du, Xiaowei Li, Bingdong Yang, Chao Zhang, Bo Xia. Research Progress of Femtosecond Laser Microhole Drilling on Non-Metallic Materials[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111417.