Photonics Research, 2020, 8 (10): 10001634, Published Online: Sep. 29, 2020   

High-gain waveguide amplifiers in Si3N4 technology via double-layer monolithic integration Download: 590次

Author Affiliations
Optical Sciences Group, MESA+ Institute for Nanotechnology, University of Twente, 7500 AE Enschede, The Netherlands
Abstract
Silicon nitride (Si3N4)-on-SiO2 attracts increasing interest in integrated photonics owing to its low propagation loss and wide transparency window, extending from 400 nm to 2350 nm. Scalable integration of active devices such as amplifiers and lasers on the Si3N4 platform will enable applications requiring optical gain and a much-needed alternative to hybrid integration, which suffers from high cost and lack of high-volume manufacturability. We demonstrate a high-gain optical amplifier in Al2O3:Er3+ monolithically integrated on the Si3N4 platform using a double photonic layer approach. The device exhibits a net Si3N4-to-Si3N4 gain of 18.1±0.9 dB at 1532 nm, and a broadband gain operation over 70 nm covering wavelengths in the S-, C- and L-bands. This work shows that rare-earth-ion-doped materials and in particular, rare-earth-ion-doped Al2O3, can provide very high net amplification for the Si3N4 platform, paving the way to the development of different active devices monolithically integrated in this passive platform.

Jinfeng Mu, Meindert Dijkstra, Jeroen Korterik, Herman Offerhaus, Sonia M. García-Blanco. High-gain waveguide amplifiers in Si3N4 technology via double-layer monolithic integration[J]. Photonics Research, 2020, 8(10): 10001634.

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