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表面改性多孔二氧化硅减反膜的稳定性研究

Stability of Surface-Modified Porous Silica Antireflective Coating

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摘要

以正硅酸乙酯为原料,采用溶胶-凝胶法制备SiO2溶胶,通过提拉法涂制多孔SiO2减反膜,并在多孔SiO2减反膜上涂制一层甲基三乙氧基硅烷(MTES)预聚体。通过疏水的MTES预聚体涂制在多孔SiO2减反膜上,对多孔SiO2减反膜的表面进行改性,以提高膜层的环境稳定性。经过表面改性的复合膜层的透过率峰值可达99.67%,折射率为1.231,水接触角达123.6°,在相对湿度为95%的环境中放置475 d后膜层的峰值透过率为99.09%,稳定性提高明显。膜层表面平整,激光损伤阈值约为24.5 J/cm 2。

Abstract

SiO2 sol is prepared using the sol-gel process with tetraethyl orthosilicate as the precursor, and the porous SiO2 antireflective coating is fabricated using the dip coating method. Further, the surface of the SiO2 coating is covered using a methyltriethoxysilane (MTES) prepolymer. The objective of the experiment is to use the hydrophobic MTES prepolymer film as a cover of the surface of the SiO2 coating and to modify the surface of the coating. Ultimately, we intend to improve the environmental stability of the porous SiO2 coating. Thus, an surface-modified composite coating exhibiting a peak transmission of 99.67%, refractive index of 1.231, and water contact angle of 123.6° is obtained. Furthermore, the peak transmission of the coating becomes as high as 99.09% and its stability considerably improves after being maintained at a relative humidity of approximately 95% for 475 days. It can also be observed that the modified coating surface is smooth and that the laser-induced damaged threshold is 24.5 J/cm 2.

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中图分类号:O484.4

DOI:10.3788/AOS201939.0831001

所属栏目:薄膜

收稿日期:2019-03-11

修改稿日期:2019-04-15

网络出版日期:2019-08-01

作者单位    点击查看

熊怀:中国科学院上海光学精密机械研究所高功率激光物理重点实验室, 上海 201800中国科学院大学材料与光电研究中心, 北京 100049
唐永兴:中国科学院上海光学精密机械研究所高功率激光物理重点实验室, 上海 201800中国科学院大学材料与光电研究中心, 北京 100049
胡丽丽:中国科学院大学材料与光电研究中心, 北京 100049中国科学院上海光学精密机械研究所高功率激光单元技术研发中心, 上海 201800
沈斌:中国科学院上海光学精密机械研究所高功率激光物理重点实验室, 上海 201800
李海元:中国科学院上海光学精密机械研究所高功率激光物理重点实验室, 上海 201800

联系人作者:熊怀(xhuai1998@siom.ac.cn)

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引用该论文

Xiong Huai,Tang Yongxing,Hu Lili,Shen Bin,Li Haiyuan. Stability of Surface-Modified Porous Silica Antireflective Coating[J]. Acta Optica Sinica, 2019, 39(8): 0831001

熊怀,唐永兴,胡丽丽,沈斌,李海元. 表面改性多孔二氧化硅减反膜的稳定性研究[J]. 光学学报, 2019, 39(8): 0831001

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