光学学报, 2019, 39 (7): 0712004, 网络出版: 2019-07-16   

激光光斑照度的散射成像测量方法 下载: 1404次

Laser Spot Illuminance Measurement Method Based on Scattering Imaging
孟晶晶 1,2余锦 1,2,*貊泽强 1,3王金舵 1,2代守军 1,2
作者单位
1 中国科学院光电研究院, 北京 100094
2 中国科学院大学, 北京 100049
3 中国科学院计算光学成像技术重点实验室, 北京 100094
摘要
微透镜阵列法是实现光束匀化的主要途径之一,通过改变成像透镜的光焦度,可在焦平面处得到大面积的均匀光斑。基于理论和实验分析了散射成像法的可行性,为了准确测量焦平面处光斑的照度,在考虑漫射板反射率及相机离轴角等影响因素的基础下,从张正友相机标定法出发,建立了图像灰度值与目标面光斑照度的数学关系;在实验中标定了漫反射板的双向漫反射分布函数,针对两种焦距的主积分透镜,测量了焦平面及附近位置处匀化光斑的照度分布。实验结果表明:当积分透镜焦距分别为300 mm和500 mm时,目标面处的激光通量基本一致,光斑大小与理论值基本接近;分别比较了两种情况下观察面离焦时光斑分布的变异系数,得到光束经微透镜后匀化效果最佳的位置。
Abstract
Micro-lens array method is one of the widely utilized approaches to realize beam homogenization. This method can achieve large-area uniform spots in the focal plane by changing the focal power of the imaging lens. Herein, the feasibility of the scattering imaging method is analyzed theoretically and experimentally. In order to accurately measure the illuminance of spots in the focal plane, the mathematical relationship between the image gray scale value and the illuminance of spots in the target plane is established using the Zhang Zhengyou's camera calibration method, after considering the interfering factors such as the reflectivity of diffusing plate and the off-axial angle of the camera. Bidirectional reflectance distribution function of the diffusing plate is experimentally calibrated. The illuminance distributions of the homogenized spots in the focal plane and its vicinity are measured for the principal integral lenses with two focal lengths. Experimental results show that when the focal lengths of the integral lens are 300 mm and 500 mm respectively, the laser fluxes are roughly equal and the measured spot sizes are basically consistent with the theoretical values in the target plane. By comparing the variation coefficients of spot distributions in the defocus observation plane for these two cases, the optimal position to realize homogenized spot distribution is obtained.

孟晶晶, 余锦, 貊泽强, 王金舵, 代守军. 激光光斑照度的散射成像测量方法[J]. 光学学报, 2019, 39(7): 0712004. Jingjing Meng, Jin Yu, Zeqiang Mo, Jinduo Wang, Shoujun Dai. Laser Spot Illuminance Measurement Method Based on Scattering Imaging[J]. Acta Optica Sinica, 2019, 39(7): 0712004.

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