大口径高次非球面的加工检测是光学制造的难题之一。结合一个有效通光口径为900 mm、顶点曲率半径为2580 mm的高次非球面凹反射镜,推导出高次非球面的球差系数。基于三级像差理论,对高次非球面的法线像差进行补偿,求解了补偿系统的初始结构。设计了基于球面波和平面波的补偿系统,并对高次非球面凹反射镜进行研磨处理,经四维(4D)干涉仪检测得到其面型精度为0.022λ,满足实际测量要求。

One of the difficult problems in optical manufacturing is to process and test large aperture and high-order aspheric surface. The spherical aberration coefficient of a high-order aspheric concave mirror with an effective aperture of 900 mm and a radius of curvature of 2580 mm was derived. Based on third-order aberration theory, the normal aberration of the high-order aspheric surface was compensated, and the initial structure of the compensation system was solved. Compensation systems based on spherical wave and plane wave were designed respectively, and the high-order aspheric concave mirrors were polished. The accuracy of the surface shape measured by four-dimensional interferometer is 0.022λ which meets the actual measurement requirements.