为研究具有更好材料稳定性的半透明薄膜太阳能电池，本文采用直流磁控溅射技术沉积氧化亚铜（Cu₂O）薄膜和氧化锌（ZnO）薄膜，制备了Cu₂O/ZnO异质结.使用扫描电镜、X射线衍射仪、拉曼光谱仪、薄膜测定系统和太阳能模拟器，研究在不同氩/氧气体流量比的条件下制备的Cu₂O层对异质结的材料特性、光学特性及光电特性的影响.研究结果表明：在一定氩/氧气体流量比范围内制备的Cu₂O/ZnO异质结，在AM1.5的标准模拟太阳光的照射下具有一定的光电转换能力，可作为半透明太阳能电池的换能单元.

In order to study the semi-transparent thin film solar cell with better material stability, use direct current magnetron sputtering technique to deposit cuprous oxide(Cu₂O) thin film and zinc oxide(ZnO) thin film, forming the Cu₂O/ZnO heterojunction. By using scanning electron microscope, X-ray diffractometer, raman spectrometer, thin film measurement instrument and solar simulator, the influence caused by Cu₂O layer prepared under different Ar/O₂ gas flow ratio on material properties, optical properties and photoelectric properties of heterojunction is studied. Results show that the Cu₂O/ZnO heterojunctions produced under the certain Ar/O₂ gas flow ratios have certain photoelectric conversion ability under the standard simulated sunlight of AM1.5, which can be used as the energy conversion unit of the semi-transparent solar cell.