中国激光, 2019, 46 (12): 1201001, 网络出版: 2019-12-02
高重复频率准分子激光器中放电冲击波特性的实验研究 下载: 984次
Experimental Study of Characteristics of Discharge Shock Waves in High-Repetition-Rate Excimer Lasers
激光光学 准分子激光器 高重复频率 放电腔 放电冲击波 阴影法 laser optics excimer lasers high repetition rate discharge chamber discharge shock wave shadow method
摘要
采用阴影法对高重复频率准分子激光器放电腔内的放电冲击波现象进行了实验研究,研究结果揭示了放电冲击波的产生以及演化过程。通过对观测结果进行分析,获得了放电冲击波的3种典型形式:横向冲击波、纵向冲击波(主电极冲击波)和预电离冲击波。估算了3种冲击波的波速,进而分析了可会受冲击波影响的重复频率。研究成果可以为高重复频率准分子放电腔的设计提供支持,尤其是可以在放电冲击波抑制结构的设计方面提供支持。
Abstract
The characteristics of the discharge shock waves in high-repetition-rate excimer laser discharge chambers are experimentally investigated using the shadow method. This results represent the generation and evolution of the discharge shock waves. Thus, three typical forms of discharge shock waves, i.e., transverse, longitudinal (the main electrode shock wave), and preionization shock waves, are obtained. Further, the velocities of these shock waves are estimated, and the repetition rate at which the shock waves may effect the discharge is analyzed. The results of this study support the design of discharge-shock-wave suppression devices in high-repetition-rate discharge chambers.
刘斌, 丁金滨, 王魁波, 周翊, 江锐, 王宇. 高重复频率准分子激光器中放电冲击波特性的实验研究[J]. 中国激光, 2019, 46(12): 1201001. Bin Liu, Jinbin Ding, Kuibo Wang, Yi Zhou, Rui Jiang, Yu Wang. Experimental Study of Characteristics of Discharge Shock Waves in High-Repetition-Rate Excimer Lasers[J]. Chinese Journal of Lasers, 2019, 46(12): 1201001.