首页 > 论文 > 中国激光 > 46卷 > 7期(pp:704009--1)

光谱共焦位移传感器线性色散物镜设计

Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

根据光谱共焦位移传感器的工作原理及线性轴向色散条件,选择3种色散物镜用玻璃材料N-KZFS11、N-SF66和N-PK52A,并结合像差理论设计了由3个单透镜和2个双胶合透镜组合成的线性色散物镜初始结构。利用Zemax光学设计软件对色散物镜的初始结构进行优化和公差分析。结果表明:在450~650 nm波长范围内,各波长弥散斑均远小于艾里斑,色散物镜测量范围可达1.05 mm,轴向色散与波长之间的线性判定系数R2达0.997,理论分辨率可达105 nm。

Abstract

In this study, the working principle of the chromatic confocal displacement sensor and the conditions of linear axial dispersion were applied for the optimal selection of three kinds of glass materials, namely N-KZFS11, N-SF66, and N-PK52A, which were combined with the theory of aberration to design the initial structure of a linear dispersive objective composed of three single lenses and two double cemented lenses. Then, the Zemax software was used to optimize the initial structure of the dispersive objective and analyze its tolerance. The results indicate that within the wavelength range from 450 nm to 650 nm, the blur spot at each wavelength is much smaller than the Airy spot. The measurement range of the dispersive objective is up to 1.05 mm, the linear determination coefficient R2 between the axial dispersion and wavelength is 0.997, and the theoretical resolution could reach 105 nm.

Newport宣传-MKS新实验室计划
补充资料

DOI:10.3788/CJL201946.0704009

所属栏目:测量与计量

基金项目:国家重大科技专项;

收稿日期:2018-12-27

修改稿日期:2019-02-18

网络出版日期:2019-07-01

作者单位    点击查看

马敬:中国科学院光电研究院, 北京 100094中国科学院大学光电学院, 北京 100049
齐月静:中国科学院微电子研究所, 北京 100029中国科学院大学光电学院, 北京 100049
卢增雄:中国科学院微电子研究所, 北京 100029中国科学院大学光电学院, 北京 100049
苏佳妮:中国科学院微电子研究所, 北京 100029
杨光华:中国科学院微电子研究所, 北京 100029中国科学院大学光电学院, 北京 100049
齐威:中国科学院微电子研究所, 北京 100029
张清洋:中国科学院微电子研究所, 北京 100029
陈进新:中国科学院微电子研究所, 北京 100029

联系人作者:卢增雄(wlzengx103@163.com)

备注:国家重大科技专项;

【1】Fang C, Xiang Y and Qi K Q. Grating lateral shearing interferometry for suppressing zero-order crosstalk. Chinese Journal of Lasers. 45(5), (2018).
方超, 向阳, 齐克奇. 抑制零级串扰的光栅横向剪切干涉测量. 中国激光. 45(5), (2018).

【2】Boeij W D, Kok H et al. . Full optical column characterization of DUV lithographic projection tools. Proceedings of SPIE. 5377, 1960-1971(2004).

【3】Chang X N, Yao Y and Yan L. The development and investigation of displacement sensor. Metrology & Measurement Technique. 36(9), 42-44(2009).
昌学年, 姚毅, 闫玲. 位移传感器的发展及研究. 计量与测试技术. 36(9), 42-44(2009).

【4】Zhu Z T, Pei W D, Li Y et al. Research and implementation of laser triangulation system based on telecentric lens. Laser & Optoelectronics Progress. 55(3), (2018).
朱铮涛, 裴炜冬, 李渊 等. 基于远心镜头的激光三角测距系统研究与实现. 激光与光电子学进展. 55(3), (2018).

【5】Wang D P, Jin X, Zhou W J et al. Nonlinear error calibration method for capacitive displacement sensor based on laser interferometry. Laser & Optoelectronics Progress. 54(10), (2017).
王大鹏, 金星, 周伟静 等. 基于激光干涉的电容位移传感器非线性误差标定方法. 激光与光电子学进展. 54(10), (2017).

【6】Xu J. Method for analysis of dual frequency laser interference mainly instrument system of linear measurement error sources and error reduction. Metrology & Measurement Technique. 40(8), 39-40(2013).
徐建. 双频激光干涉仪系统线性测量误差主要来源及减小误差的方法分析. 计量与测试技术. 40(8), 39-40(2013).

【7】Miks A, Novak J and Novak P. Analysis of method for measuring thickness of plane-parallel plates and lenses using chromatic confocal sensor. Applied Optics. 49(17), 3259-3264(2010).

【8】Ruprecht A K, Pruss C, Tiziani H J et al. Confocal micro-optical distance sensor: principle and design. Proceedings of SPIE. 5856, 128-136(2005).

【9】Pruss C, Ruprecht A, Korner K et al. Diffractive elements for chromatic confocal sensors. DGaO Proceedings. 106-107(2005).

【10】Miks A, Novak J and Novak P. Theory of hyperchromats with linear longitudinal chromatic aberration. Proceedings of SPIE. 5945, (2005).

【11】Zhu W B, Zhong J, Mo R Y et al. Design of spectral confocal chromatic displacement sensor objective. Opto-Electronic Engineering. 37(8), 62-66(2010).
朱万彬, 钟俊, 莫仁芸 等. 光谱共焦位移传感器物镜设计. 光电工程. 37(8), 62-66(2010).

【12】Liu Q, Wang Y, Yang W C et al. Chromatic confocal microscope with linear dispersive objective. High Power Laser and Particle Beams. 26(5), 52-57(2014).
刘乾, 王洋, 杨维川 等. 线性色散设计的光谱共焦测量技术. 强激光与粒子束. 26(5), 52-57(2014).

【13】Tian Y and Liu B. Design of dispersion lens for chromatic confocal displacement sensor. Optical Technique. 44(3), 381-384(2018).
田雨, 刘宾. 光谱共焦位移传感器色散镜头设计. 光学技术. 44(3), 381-384(2018).

【14】Wu P Y and Yuan D C. Research of design of lenses used for chromatic confocal displacement sensor. Tool Engineering. 46(2), 81-83(2012).
武芃樾, 袁道成. 光谱共焦位移传感器镜头设计研究. 工具技术. 46(2), 81-83(2012).

【15】Liu Q, Yang W C, Yuan D C et al. Design of linear dispersive objective for chromatic confocal microscope. Optics and Precision Engineering. 21(10), 2473-2479(2013).
刘乾, 杨维川, 袁道成 等. 光谱共焦显微镜的线性色散物镜设计. 光学精密工程. 21(10), 2473-2479(2013).

【16】Liu Q, Yang W C, Yuan D C et al. Optimization and selection of materials for dispersive objective of chromatic confocal microscope. Opto-Electronic Engineering. 39(8), 111-117(2012).
刘乾, 杨维川, 袁道成 等. 光谱共焦显微镜中色散物镜材料的优化选择. 光电工程. 39(8), 111-117(2012).

【17】Fischer R E. Optical system design. 4th ed. New York: McGraw Hill. 63-68(2004).

引用该论文

Jing Ma,Yuejing Qi,Zengxiong Lu,Jiani Su,Guanghua Yang,Wei Qi,Qingyang Zhang,Jinxin Chen. Design of Linear Dispersive Objective for Chromatic Confocal Displacement Sensor[J]. Chinese Journal of Lasers, 2019, 46(7): 0704009

马敬,齐月静,卢增雄,苏佳妮,杨光华,齐威,张清洋,陈进新. 光谱共焦位移传感器线性色散物镜设计[J]. 中国激光, 2019, 46(7): 0704009

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF