中国激光, 2020, 47 (4): 0410002, 网络出版: 2020-04-09
泰曼-格林干涉型衍射光栅位移传感器 下载: 1132次
Diffraction Grating Displacement Sensor Based on Twyman-Green Interference
摘要
利用波片进行同步相位延迟,将波片与偏振分光棱镜相结合获得四路相位差为90°的正弦信号,从而将衍射光栅位移传感器的量程范围提升到激光相干长度的二分之一。对两路相位差为180°的信号进行差分处理,可有效避免激光功率抖动、背景光干扰、运放温度漂移等因素带来的影响。最后利用细分插值电路对光路的输出信号构建反正切函数,实现了正弦函数的非线性模/数转换及2.54 nm的位移分辨率。这种具有高分辨率、大量程的位移传感器未来将进一步推动自动化机械设备、电子制造业以及工业智能领域的快速发展。
Abstract
In this work, by combining a polarization beam-splitter prism and a wave-plate, four sinusoidal signals with a phase difference of 90° were generated. The wave-plate was used for synchronous phase delay. The operation range of the diffraction grating displacement sensor was increased to one-half of the coherence length of the laser. By differentially processing two signals with a phase difference of 180°, it is possible to avoid the effects of the laser power stability, background light, and the temperature drift of the operational amplifier. Finally, an interpolation circuit was used to construct the arctangent function of the output signal to realize the nonlinear A/D conversion of the sinusoidal function and a displacement resolution of 2.54 nm. In the future, this type of high-resolution and large-range displacement sensor will promote the development of automation equipment, electronic manufacturing, and the industrial intelligence field.
梁洲鑫, 李孟委, 张瑞, 金丽, 辛晨光, 解琨阳, 赵宏波. 泰曼-格林干涉型衍射光栅位移传感器[J]. 中国激光, 2020, 47(4): 0410002. Liang Zhouxin, Li Mengwei, Zhang Rui, Jin Li, Xin Chenguang, Xie Kunyang, Zhao Hongbo. Diffraction Grating Displacement Sensor Based on Twyman-Green Interference[J]. Chinese Journal of Lasers, 2020, 47(4): 0410002.