激光与光电子学进展, 2020, 57 (19): 190801, 网络出版: 2020-10-17   

基于平面波Offner补偿器检验非球面的光学系统设计 下载: 718次

Optical System Design of Offner Compensator with Infinity Object Distance Applied on Aspheric Mirror Testing
周浩 1,2王欣 1,2,*刘强 1,2贾建军 1,2舒嵘 1,2
作者单位
1 中国科学院上海技术物理研究所空间主动光电技术重点实验室, 上海 200083
2 中国科学院大学, 北京 100049
摘要
针对米级大口径非球面,从平面波Offner零位补偿器检验光路的三级像差理论公式出发,推导计算了补偿器与被检镜面口径比不同时的光学规化参数,经过光学软件仿真,获取不同口径比下6种曲率半径非球面的最大口径和最大相对孔径。结果表明随着口径比的减小,平面波补偿检验非球面的相对孔径能力随之减弱,对于不同相对孔径的非球面检验,可选择最小口径比来达到检测要求。针对口径为720 mm的凹非球面镜检验,基于工程可行性,采用口径比α1=0.2的Offner补偿器,获得方均根(RMS)为0.0033λ的设计,实际检验测量中RMS为0.019λ,符合对该非球面的检验要求。
Abstract
This paper aims to make a meter-scale aspheric mirror testing on a large aperture. Third-order aberration theory of Offner null compensator with infinity object distance is introduced. And the normalized optical parameters of the aspheric mirrors are calculated in different aperture ratios of the compensators to the mirrors under test. Then the relative optical designs corresponding to different aperture ratios and six kinds of curvature radii are scaled using optical software, and the maximum diameter and relative aperture of the aspheric mirror are obtained. The results show that, with the reduction of the aperture ratio, it is more difficult to test the relative aperture of the aspheric surface tested with plane wave compensation. An appropriate minimum aperture ratio can be selected for the aspheric surfaces with different relative apertures. Considering engineering feasibility, the Offner compensator with an aperture ratio α1=0.2 is used to test a concave aspheric mirror with an aperture of 720 mm. The wavefront error (RMS) of the design is 0.0033 λ, and in the actual test, the RMS is 0.019 λ, which meets the requirement of the aspheric surface test.

周浩, 王欣, 刘强, 贾建军, 舒嵘. 基于平面波Offner补偿器检验非球面的光学系统设计[J]. 激光与光电子学进展, 2020, 57(19): 190801. Hao Zhou, Xin Wang, Qiang Liu, Jianjun Jia, Rong Shu. Optical System Design of Offner Compensator with Infinity Object Distance Applied on Aspheric Mirror Testing[J]. Laser & Optoelectronics Progress, 2020, 57(19): 190801.

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