光学学报, 2020, 40 (9): 0934001, 网络出版: 2020-05-06
用于同步辐射的硬X射线相位补偿镜的研究 
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Study on Phase Compensation Mirror Used for Hard X-Ray Synchrotron Radiation
X射线光学 X射线变形镜 相位补偿 X射线散斑扫描技术 硬X射线聚焦 同步辐射 X-ray optics X-ray deformable mirror phase compensation X-ray speckle scanning metrology hard X-ray focusing synchrotron radiation
摘要
设计和加工了一台相位补偿的压电变形镜,使用干涉仪离线表征了其压电变形性能,并提出迭代全局优化算法,实现了变形镜对目标面形的快速高精度逼近。结合X射线散斑扫描技术,在光束的聚焦模式下测试了变形镜的在线相位补偿性能和对聚焦光斑尺寸的优化能力,结果显示,初始的43.4 μm焦斑尺寸经相位补偿后被压缩到了12.9 μm。上述研究为上海同步辐射光源的快速相位补偿提供了可能。
Abstract
A piezoelectric deformable mirror for phase compensation is designed and fabricated and its piezoelectric properties are ex situ characterized by using the Fizeau interferometer. Moreover, an iterative global optimization algorithm is developed to realize a quick and accurate approach to the target figure. The in situ phase compensation performance of the mirror and its ability to optimize the focusing spot size are verified under the focusing beam mode and with the hard X-ray speckle scanning metrology. The experimental results show that the focal spot size is compressed from 43.4 μm to 12.9 μm after phase compensation. The research here lays a foundation for the realization of rapid phase compensation in the Shanghai Synchrotron Radiation Facility.
田纳玺, 蒋晖, 李爱国, 梁东旭, 闫帅. 用于同步辐射的硬X射线相位补偿镜的研究[J]. 光学学报, 2020, 40(9): 0934001. Naxi Tian, Hui Jiang, Aiguo Li, Dongxu Liang, Shuai Yan. Study on Phase Compensation Mirror Used for Hard X-Ray Synchrotron Radiation[J]. Acta Optica Sinica, 2020, 40(9): 0934001.
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