提出了一种基于光子晶体的二维多通道光学化学传感器。该器件由中心波长为3.3 μm的四个腔组成，各通道工作波长间隔为10 nm。该传感器采用800 nm厚的绝缘体上硅材料，可利用标准CMOS技术加工。通过三维时差有限差分法对微腔结构的光学特性进行模拟。每个通道的传输效率为39％，通道之间的传输效率不一致性小于0.25dB。该传感器的功能为检测四氯化碳和苯溶液浓度，其灵敏度为209.2 nm/RIU。

We propose a multichannel two-dimensional optical chemical sensor in a photonic crystal (PhC) slab. The device is composed of four cavities with a center wavelength at 3.3μm, and the channels are spaced by 10nm. The sensor is designed on an 800-nm-thick silicon-on-insulator platform for standard CMOS technology. The optical characteristics of the nanocavity structure are simulated by 3-D finite difference time-domain (FDTD) method. The transmittance of each channel is about 39%, with non-uniformity of transmittance across channels less than 0.25dB. The capability of the sensor is demonstrated by detecting carbon tetrachloride and benzene solutions, and shows a sensitivity of 209.2nm/RIU.