中国激光, 2020, 47 (7): 0704002, 网络出版: 2020-07-10
基于定向耦合结构的聚合物波导热光模式开关研究
Polymeric Waveguide Thermo-Optic Switch Based on Directional Coupler
集成光学 模式开关 热光效应 聚合物波导 定向耦合器 integrated optics mode switch thermo-optic effect polymeric waveguide directional coupler
摘要
设计并制备了一种基于非对称定向耦合结构的聚合物波导热光模式开关。该器件由一个单模波导和一个双模波导组成。在双模波导上制作金属加热器,通过向加热器提供驱动电压,可以实现单模波导中的LP01模与双模波导中的LP11a模的转换。选用硅作为衬底,聚合物EpoClad和SU-8分别作为波导的包层与芯层材料,采用传统的半导体微加工工艺制备了热光模式开关器件。当工作波长为1550 nm时,热光模式开关的消光比可以达到14.6 dB,驱动功率为29.6 mW,模式开关的上升时间和下降时间分别为660 μs和480 μs。该器件在可重构模分复用系统中具有广阔的应用前景。
Abstract
Herein, a polymeric thermo-optic (TO) mode switch based on an asymmetric directional coupler was fabricated. The device comprised a single-mode waveguide (SMW) and two-mode waveguide (TMW). The metal heater was deposited on TMW to achieve switching from the LP01 mode in SMW to LP11a mode in TMW by driving the voltage supplied to the heater. Using the traditional semiconductor microfabrication technology, the TO switch was fabricated on a Si substrate using EpoClad and SU-8 polymers as the cladding and core layers, respectively. When the operating wavelength was 1550 nm, the TO switch extinction ratio was 14.6 dB, driving power was 29.6 mW, and rise and fall times were 660.0 and 480.0 μs, respectively. The device has numerous potentials in reconfigurable mode-division-multiplexing systems.
王力磊, 张大明, 廉天航, 杨凯迪, 王菲, 王希斌. 基于定向耦合结构的聚合物波导热光模式开关研究[J]. 中国激光, 2020, 47(7): 0704002. Wang Lilei, Zhang Daming, Lian Tianhang, Yang Kaidi, Wang fei, Wang Xibin. Polymeric Waveguide Thermo-Optic Switch Based on Directional Coupler[J]. Chinese Journal of Lasers, 2020, 47(7): 0704002.