激光与光电子学进展, 2020, 57 (11): 111403, 网络出版: 2020-06-02
飞秒脉冲激光的时空变换影响纳米光栅直写过程的研究进展 下载: 1424次特邀综述
Research Progress on Spatio-Temporal Coupling of Femtosecond Pulse Laser for Direct-Writing Nanograting
激光光学 飞秒激光 时空耦合 纳米光栅 脉冲前沿倾斜 非互逆性直写 laser optics femtosecond laser spatio-temporal coupling nanograting pulse front tilt non-reciprocal writing
摘要
超短脉冲的时空特性已经展示了对材料改性的重要影响,在过去十几年迅速成为飞秒激光微加工领域的研究热点。为此,简要从飞秒脉冲时空耦合的基本概念出发,回顾了实验中观察到的时空耦合效应及基于时空耦合的时空聚焦技术,介绍了时空聚焦技术在加工领域的应用,重点讨论了时空耦合对透明材料内部的非互逆性直写及不对称纳米光栅结构的影响。
Abstract
Spatio-temporal characteristics of ultrashort pulse has shown a vital impact on the material modification, and have gradually become a research hotspot in the field of femtosecond laser micromachining in the last decades. According to the basic concepts of the spatiotemporal coupling of femtosecond pulses, the effects of spatio-temporal coupling as well as spatio-temporal focusing techniques are reviewed briefly. Then it introduces a few applications of spatio-temporal focusing technology on material processing, and especially discusses the influence of spatio-temporal coupling on the non-reciprocal direct writing and the asymmetric nanograting structure in transparent materials.
李跃东, 尹唯一, 戴晔. 飞秒脉冲激光的时空变换影响纳米光栅直写过程的研究进展[J]. 激光与光电子学进展, 2020, 57(11): 111403. Yuedong Li, Weiyi Yin, Ye Dai. Research Progress on Spatio-Temporal Coupling of Femtosecond Pulse Laser for Direct-Writing Nanograting[J]. Laser & Optoelectronics Progress, 2020, 57(11): 111403.