基于边界耦合的方法构造一种基于金属-介质-金属(MIM)纳米谐振腔波导组成的滤波器,该结构由1个拱型谐振腔和1个矩阵波导管组成。通过有限元法(FEM)仿真分析拱型腔波导MIM结构滤波器的传输特性曲线、谐振波长和磁场分布图。研究结果表明该拱型腔滤波器具有平滑的传输曲线、平坦的通带、较宽的带宽,且通带透射率高达0.976,阻带透射率低至0.001,这表示此结构滤波器具有良好的滤波特性。通过对该拱型结构滤波器进行参数优化,可以在光通信波段的三个通信窗口上实现通道选择的滤波功能,该结构滤波器在高密度光集成电路和纳米光学中具有广阔的应用前景。

A tunable filter based on a metal-insulator-metal (MIM) nano-cavity waveguide is constructed by using side-coupled method, which consists of an arch-type resonator and a rectangular waveguide. The transmission characteristic spectra, resonance wavelength distribution and magnetic field distribution of the arch-type cavity waveguide MIM structure filter have been numerically simulated and analyzed by finite element method (FEM). The results show that the arch-cavity filter has smooth transmission spectra, flat passband with transmittance of 0.976, stopband with transmittance of 0.001 and wide bandwidth,which shows that this structure filter has good filtering characteristics. By optimizing the parameters of the type structure filter, the channel selection filtering function can be realized in three communication windows of the optical communication band. This structure filter has great application prospects in high-density optical integrated circuits and nano-optics.