光学学报, 2019, 39 (8): 0818001, 网络出版: 2019-08-07   

基于条纹投影的显微镜自动对焦研究 下载: 1231次

Microscope Autofocus Research Based on Stripe Projection
作者单位
合肥工业大学仪器科学与光电工程学院, 安徽 合肥 230009
摘要
自动对焦技术是薄膜晶体管液晶面板(TFT-LCD)检测中非常重要的一环。针对TFT-LCD液晶面板的检测中需要快速准确地对焦到液晶面板被测面的问题,提出一种可自动对焦的显微镜系统。将数字光栅投影到物面上,先通过分光棱镜将光分成两路,一路被面阵CCD接收,另一路通过分光棱镜和反射镜将光栅的像分成两路,分别成像在线阵CCD的靶面上。通过线阵CCD上两个光栅图清晰度的对比实现离焦方向和离焦量的判断,使用微位移平台移动物镜,实现显微镜的自动对焦。本研究对自动对焦数字光栅的影响因素进行分析,并采用变周期数字光栅进行对焦。
Abstract
Autofocus technology is a crucial part in the detection of thin film transistor liquid crystal display (TFT-LCD). Because the fast and accurate autofocus is required, an autofocus microscope system is adopted to detect TFT-LCD. The digital grating is projected onto the surface of the measured object. The reflected light is split into two paths using a beam-splitting prism. One is imaged onto the area-array charge-coupled device (CCD) directly, whereas the other is split into two paths using another beam-splitting prism again. A reflecting mirror is used to couple two images of the digital grating onto a line-array CCD. The defocusing direction and defocusing amount are judged by comparing the sharpness of two grating images on the line-array CCD. In addition, a micro-displacement platform is used to move the objective lens and achieve the microscope autofocus. Thus, this study analyzes the digital grating, which affects autofocus, and uses a variable-period digital grating for focusing.

刘璐, 闫佩正, 但西佐, 鲍思源, 王永红. 基于条纹投影的显微镜自动对焦研究[J]. 光学学报, 2019, 39(8): 0818001. Lu Liu, Peizheng Yan, Xizuo Dan, Siyuan Bao, Yonghong Wang. Microscope Autofocus Research Based on Stripe Projection[J]. Acta Optica Sinica, 2019, 39(8): 0818001.

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