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参考面误差对平面子孔径拼接的影响

Effect of Reference Surface Error on Subaperture Stitching for Flat Optics

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摘要

参考面二阶项(离焦和像散)误差是导致拼接累积误差的主要因素,而参考面高阶误差会导致高频面形误差。分析由参考面误差二阶项和高阶项导致的拼接误差的规律。研究参考面误差导致任意两个子孔径拼接误差之间的关系。提出一种可以有效减小参考面高阶项误差对子孔径拼接结果影响的算法。该算法将拼接后的子孔径面形数据对应相减,分离出参考面高阶项误差的拼接误差。数据仿真和实验验证表明了该算法的正确性和有效性。

Abstract

The second-order (defocusing and astigmatism) error of the reference surface is the major factor that results in accumulated stitching errors, whereas the higher-order errors of the reference surface will result in high-frequency shape errors. Subsequently, the law of stitching errors caused by the second- and higher-order errors of the reference surface is analyzed, and the relation between any two subaperture stitching errors that can be attributed to the reference surface error is studied. Further, an algorithm is proposed to effectively reduce the influences of the higher-order errors of the reference surface on the subaperture stitching results. The stitching errors of the higher-order errors of the reference surface are isolated using this algorithm to eliminate the stitched surface data of any two subapertures. Furthermore, the validity and effectiveness of this algorithm are verified using simulations and experiments.

Newport宣传-MKS新实验室计划
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中图分类号:O436.1

DOI:10.3788/CJL201946.1204006

所属栏目:测量与计量

收稿日期:2019-07-19

修改稿日期:2019-08-29

网络出版日期:2019-12-01

作者单位    点击查看

李萌阳:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
曹庭分:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
袁晓东:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
张尽力:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
刘长春:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
易聪之:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
陈海平:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
全旭松:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900

联系人作者:袁晓东(yxd66my@163.com)

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引用该论文

Li Mengyang,Cao Tingfen,Yuan Xiaodong,Zhang Jinli,Liu Changchun,Yi Congzhi,Chen Haiping,Quan Xusong. Effect of Reference Surface Error on Subaperture Stitching for Flat Optics[J]. Chinese Journal of Lasers, 2019, 46(12): 1204006

李萌阳,曹庭分,袁晓东,张尽力,刘长春,易聪之,陈海平,全旭松. 参考面误差对平面子孔径拼接的影响[J]. 中国激光, 2019, 46(12): 1204006

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