激光与光电子学进展, 2020, 57 (18): 183201, 网络出版: 2020-09-02  

飞秒激光烧蚀光斑灰度特征的小波处理与分析 下载: 916次

Wavelet Processing and Analysis of Grayscale Features of Femtosecond Laser Ablation Spots
作者单位
华北理工大学电气工程学院, 河北 唐山 063210
摘要
对等离子体光斑的灰度特征进行分析。首先,在HSL彩色空间上对原光斑图像的L分量进行主成分提取并结合掩模处理,得到具有高信噪比的有效灰度图。对处理前后单个光斑图像的平均灰度曲线进行分析,发现原光斑图像的灰度曲线包含许多毛刺,而经处理后的曲线更为平滑。其次,对光斑序列样本图像的灰度特征进行提取,发现光斑序列图像的灰度随飞秒激光束往复烧蚀运动呈周期性变化。然后,采用分形插值与小波变换相结合的方法对光斑序列图像的平均灰度特征曲线进行处理,该方法不仅清晰地保留了平均灰度特征曲线的细节信息,而且使该曲线变得更为平滑。最后,对光斑灰度特征与烧蚀加工功率、加工平台运动之间的相关性进行分析,发现之间存在极强的相关性,这对利用光斑灰度指标调节激光功率和反馈微结构的加工深度提供了有意义的依据。
Abstract
In this study, the grayscale characteristics of plasma spots are analyzed. First, the L component of the original spot images is extracted based on the principal component combined with mask processing in the HSL color space. Thus, effective grayscale images can be obtained with a high signal-to-noise ratio. The average grayscale curves of single spot image are analyzed before and after processing, and the grayscale curves of the original spot images contain several burrs, whereas those of the processed image are smoother. Second, by extracting the grayscale feature of the spot sequence images, the graysale value of the spot sequence images can be observed to change periodically with the reciprocating ablation motion of the femtosecond laser beam. Third, a method that combines fractal interpolation with wavelet transformation is used for processing the average grayscale characteristic curves of the spot sequence images. This method not only keeps the detail information of the average grayscale characteristic curve clearly, but also makes the curve smoother. Finally, by analyzing the correlation between the spot grayscale characteristics as well as the ablative processing power and the movement of the processing platform, a strong correlation can be observed between them. Thus, this study provides a significant basis for adjusting the laser power and obtaining the processing-depth feedback of microstructures based on the spot grayscale index.

王福斌, 孙志林, 王尚政. 飞秒激光烧蚀光斑灰度特征的小波处理与分析[J]. 激光与光电子学进展, 2020, 57(18): 183201. Fubin Wang, Zhilin Sun, Shangzheng Wang. Wavelet Processing and Analysis of Grayscale Features of Femtosecond Laser Ablation Spots[J]. Laser & Optoelectronics Progress, 2020, 57(18): 183201.

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