激光与光电子学进展, 2020, 57 (7): 071607, 网络出版: 2020-03-31
折射型红外微透镜阵列器件的发展及制备 下载: 2586次特邀综述
Development and Preparation of Refractive Infrared Microlens Array Device
摘要
光学器件的小型化、集成化是现代光学系统发展的重要趋势。在微小光学器件中,阵列化折射成像微光学器件主要包括微透镜阵列器件等,广泛应用于成像、计量、波束整形等领域。针对红外波段成像、计量测量、激光加工等领域的特殊应用需求,红外波段工作的微透镜阵列器件受到了广泛重视,并得到迅速发展。总结了红外微透镜阵列器件的发展及制备方法,包括使用不同材料、不同制造方法制备红外微光学器件,以及红外微透镜阵列器件在红外波段成像、计量、并行加工、光束匀化方面的应用,分析了红外微透镜阵列器件及其制造方法存在的挑战与机遇。
Abstract
Miniaturization and integration of optical devices are important trends in the development of modern optical systems. In micro-optical devices, arrayed refractive imaging micro-optical devices mainly include microlens array devices, which are widely used in imaging, metrology, beam shaping and other fields. In response to the special application requirements in the infrared band imaging, metrological measurement, laser processing and other fields, microlens array devices working in the infrared band have received extensive attention and have developed rapidly. This paper summarizes the development and preparation methods of infrared microlens array devices, including the preparation of infrared micro-optical devices with different materials and manufacturing methods, and the application of infrared micro-lens array devices in infrared band imaging, metrology, parallel processing, and beam homogenization. The challenges and opportunities of infrared microlens array devices and their manufacturing methods are also analyzed.
刘丰, 张帆, 边浩, 杨青, 李敏静, 陈烽. 折射型红外微透镜阵列器件的发展及制备[J]. 激光与光电子学进展, 2020, 57(7): 071607. Feng Liu, Fan Zhang, Hao Bian, Qing Yang, Minjing Li, Feng Chen. Development and Preparation of Refractive Infrared Microlens Array Device[J]. Laser & Optoelectronics Progress, 2020, 57(7): 071607.