光瞳滤波器作为实现超分辨的基本元件之一,它的设计以及制作都非常重要。设计了一种正弦变化的振幅型光瞳滤波器,可以通过调节少量的参量实现各种不同的超分辨模式。选择正弦函数的周期以及光瞳中心点透过率变化两个参量来实现对最终超分辨效果的调节。数值计算结果表明:在整个入射光瞳上的透过率瞳函数分布具有0.5～2个正弦振幅周期时,较为合适。小于0.5个周期将不会有任何超分辨效果,大于2个周期超分辨效果反而变差。数值计算中还注意到,当周期数为整数时,斯特雷尔比将保持0.25不变。对正弦变化振幅型光瞳滤波器的计算结果,显示了其特殊的性质,对实际中制作正弦变化振幅型光瞳滤波器有一定的指导作用。

Optical pupil filter is one of the basic elements for optical superresolution. So it is important to design and manufacture the optical pupil filter. The amplitude optical pupil filters with sine functions were designed. This pupil filter can realize different types of superresolution by changing the periods of sine function or the transmittance of the central point. By numerical calculations, It is noticed that 0.5～2 sine periods is suitable for superresolution. When the number of periods is smaller than 0.5, there is no superresolution effect. And the superresolution effect is worse as the number bigger than 2. In numerical calculation it is also noticed that the Strehl ratio is unchanged with the central point transmittance when the number of periods is integer and its value is 0.25. The numerical results show the typical properties of amplitude optical pupil filters with sine functions and it will help manufacture it.