The spatial resolved method, which measures the laser-induced damage fluence by identifying the location of damage point at the Gaussian beam three-dimensional direction, is demonstrated. The advantages and practicality of this method has been explained. Taking a triple frequency beam splitter as an example, the defect damage fluence can be calculated by the spatial resolved method accurately. The different defect damage performance of the triple frequency splitter was distinguished under irradiations of 355nm laser only and 532nm laser only. The spatial resolved method provides a way to obtain precise information of optical film defect information.
shan chong, Zhao Yuanan, Gao Yanqi, Zhao Xiaohui, Hu Guohang, Ma Weixin, Shao Jianda. Study of laser-induced defects in an optical multilayer coatings by spatial resolved method[J]. Chinese Optics Letters, 2019, 17(3): .
