设计和制备了一种用于1064 nm分振幅光偏振测量仪(DOAP)的具有多层介质薄膜结构的差分相移分束镜。通过理论分析该DOAP系统的仪器矩阵参数, 得到分束镜的最优参数, 并用离子束溅射沉积方法制备了分束镜样品及其背面的减反射膜, 其实测结果与设计值吻合较好。与单层薄膜分束镜相比, 多层介质薄膜分束镜不受基板、膜层材料, 以及入射角和工作波长的限制, 具有更广泛的应用。

A differential phase shift beam splitter with a multi-layer dielectric film structure which is used for a division-of-amplitude photopolarimeter (DOAP) with an operating wavelength of 1064 nm is designed and prepared. The optimal parameters of beam splitter are obtained by analyzing instrument matrix parameters of the DOAP system. The beam splitter sample and its anti-reflection coating on the backside are prepared with the ion beam sputtering (IBS) deposition method. The experimental results are well consistent with the designed value. Comparing with single-layer film beam splitters, this multilayer dielectric film beam splitters possess a wider application, which is not limited by the substrate, layer materials, incident angle, and operating wavelength.