主要探讨了一种基于多层多齿谐振光栅结构的高性能偏振无关反射镜。得益于TE和TM偏振光泄漏模谐振的共存及相互作用,该器件在1.65~1.72 μm较宽的频谱范围内具有反射率大于97%、角度带宽约为24.6°、插入损耗小于0.25 dB、偏振相关损耗小于0.18 dB的优越性能。通过严格耦合波分析方法验证了此器件在现有工艺误差范围内具有较好的工艺容差性。

A high-performance polarization independent reflector based on a multilayered grating structure with multi-subpart profile is discussed. Owing to the advantages of co-existence and interaction of TE polarization light and TM polarization light leaky modes, the proposed reflector can offer combined merits of high reflectivity (over 97%), wide angular bandwidth (about 24.6°), low insertion loss (below 0.25 dB) and low polarization dependent loss (below 0.18 dB) over a broadband spectrum of 1.65-1.72 μm. The rigorous coupled wave analysis method is used to verify the good process tolerance of the reflector in the existing process error range.