为了实现毫秒级分辨力光栅式角位移的测量,从光学角度出发,对光栅的设计、制作形成和空间滤波方法进行实验研究;依据马赫-曾德尔干涉法原理进行多光束全息光栅设计;同时对矩形光栅和制作的多光束干涉全息光栅进行相应的空间滤波成像处理;最后选取平行光和点光源两种光源进行检测,并利用面阵CCD和线阵CCD对光栅的衍射信息进行采集,分别从条纹质量、透过率函数和频谱三个方面对空间滤波成像处理前后的光栅进行检验。结果表明:空间滤波成像处理可以减少光栅中高次谐波的含量,明显改善光栅信号的质量;随着衍射光栅空间频率的增大,光栅的正弦性有效提高。

To realize millisecond resolution measurement of grating angular displacement, we study the design, fabrication, and spatial filtering method of gratings from the viewpoint of optics. According to the Mach-Zehnder interferometry principle, multi-beam holographic gratings are designed. At the same time, spatial filtering imaging processing of the rectangular grating and the multi-beam holographic grating is carried out. Parallel light and point light are selected as light sources of the test. Diffraction information of the gratings is collected by using area array charge coupled device (CCD) and linear array CCD. The gratings before and after spatial filtering imaging are tested from aspects of fringe quality, transmittance functions, and frequency spectra. The results show that the higher harmonic contents of the gratings are decreased with the utilization of the spatial filtering imaging processing method, and grating signal quality is significantly improved. The sine property of the gratings is effectively improved with the increase of spatial frequency of the diffraction gratings.