激光与光电子学进展, 2018, 55 (2): 021402, 网络出版: 2018-09-10  

激光诱导钡化合物化学反应刻蚀石英玻璃的机理 下载: 959次

Etching Mechanism of Quartz Glass by Laser-Induced Chemical Reactions of Barium Compounds
作者单位
江南大学机械工程学院, 江苏 无锡 214122
摘要
提出了两种利用红外激光诱导钡化合物化学反应刻蚀石英玻璃的新方法,钡化合物分别选用BaCrO4和Ba(OH)2。通过能谱分析进行推理和利用X射线衍射图谱分析和验证,发现激光诱导BaCrO4化学反应刻蚀石英玻璃过程中得到的微通道出现崩边和微裂纹现象,BaCrO4分解生成的BaO在高温条件下与SiO2发生化学反应生成BaSiO3,因此这种方法能直接用于刻蚀石英玻璃;在激光诱导Ba(OH)2化学反应刻蚀石英玻璃的过程中,Ba(OH)2以及其分解生成的BaO在高温条件下都会与SiO2发生化学反应生成BaSiO3,也能直接刻蚀石英玻璃。两种方法的刻蚀机理不同,故刻蚀效果存在较大差异。
Abstract
Two new methods for etching quartz glass by infrared-laser-induced chemical reactions of barium compounds are proposed, where the two barium compounds are BaCrO4 and Ba (OH)2,respectively. Via the deduction by the energy dispersive X-ray spectrometer and the analysis and test by the X-ray diffraction (XRD), it is found that micro-cracks and edges occur in the micro-channels obtained in the process of etching quartz glass by laser-induced chemical reactions of BaCrO4. Meanwhile, the decomposition of BaCrO4 produces BaO, which has a chemical reaction with SiO2 to generate BaSiO3 at high temperature, and thus this method can be used for etching quart glass directly. In the process of etching quartz glass by laser-induced chemical reactions of Ba(OH)2, both Ba(OH)2 and its decomposed BaO have chemical reactions with SiO2 at high temperature to generate BaSiO3, and thus this method can also be used for etching quartz glass directly. Different etching mechanisms for these two methods lead to relatively obvious difference of etching quality.

丛启东, 袁根福, 章辰, 郭百澄. 激光诱导钡化合物化学反应刻蚀石英玻璃的机理[J]. 激光与光电子学进展, 2018, 55(2): 021402. Qidong Cong, Genfu Yuan, Chen Zhang, Baicheng Guo. Etching Mechanism of Quartz Glass by Laser-Induced Chemical Reactions of Barium Compounds[J]. Laser & Optoelectronics Progress, 2018, 55(2): 021402.

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