激光与光电子学进展, 2019, 56 (12): 120501, 网络出版: 2019-06-13
多形貌多周期微纳米复合结构的制备及表征 下载: 1315次封面文章
Preparation and Characterization of Multi-Morphological and Multi-Periodical Micro-Nano Composite Structures
光栅 微纳米复合结构 紫外光刻 激光双光束干涉工艺 多形貌 多周期 grating micro-nano composite structures ultraviolet lithography two-beam laser interference lithography multi-morphology multi-period
摘要
采用传统紫外光刻技术与激光双光束干涉光刻技术相结合的方法,以及激光双光束干涉连续两次曝光的工艺方法,制备了具有多种形貌和周期的微纳米复合结构,解决了利用传统激光干涉加工技术制备微结构的形貌和周期单一的问题。通过优化实验条件,制备出了微米条形光栅、矩形、圆形和六边形点阵与纳米光栅相结合的微纳米复合结构;在玻璃/银膜/CH3NH3PbI3结构中引入微纳米复合光栅结构,CH3NH3PbI3的吸收在可见光范围内得到明显增强,这主要归因于微米光栅的散射效应和银膜/CH3NH3PbI3界面表面等离子激元的电场增强效应的共同作用。
Abstract
In this study, the micro-nano composite structures having multiple morphologies and periods were fabricated via conventional ultraviolet photolithography combined with two-beam laser interference lithography and two-step exposure via two-beam laser interference lithography. The micro-nano composite structure could overcome the shortages imposed by conventional laser photolithography, which yields the microstructures with single morphology and period. By optimizing the experimental parameters, the micro-nano composite structures having different nano-gratings, such as micro-strip gratings, rectangular lattices, circular lattices, and hexagonal lattices, were fabricated. By incorporating the micro-nano composite grating in glass/Ag film/CH3NH3PbI3, the absorption of CH3NH3PbI3 is enhanced in the visible range. This enhancement is mainly attributed to the coaction of light scattering of micro-grating and electric field enhancement of surface plasmon polaritons at the Ag film/CH3NH3PbI3 interface.
王康, 金玉, 刘昱玮, 李志祥, 骆昕, 吴志军, 相春平. 多形貌多周期微纳米复合结构的制备及表征[J]. 激光与光电子学进展, 2019, 56(12): 120501. Kang Wang, Yu Jin, Yuwei Liu, Zhixiang Li, Xin Luo, Zhijun Wu, Chunping Xiang. Preparation and Characterization of Multi-Morphological and Multi-Periodical Micro-Nano Composite Structures[J]. Laser & Optoelectronics Progress, 2019, 56(12): 120501.