中国激光, 2017, 44 (9): 0903002, 网络出版: 2017-09-07
基于硫系玻璃的短中波红外减反膜研制 下载: 1145次
Preparation of Short and Medium Wave Infrared Anti-Reflective Coating Based on Chalcogenide Glass
薄膜 硫系玻璃 红外成像系统 连接层 应力分析 thin films chalcogenide glass infrared imaging system connection layer stress analysis
摘要
以硫系玻璃为基底, 根据膜系设计理论, 结合软件完成了短中波红外减反膜的设计。通过对材料热应力的计算分析, 研制了一种混合材料M-11作为连接层, 优化了沉积工艺参数, 并根据其力学特性修正膜系结构, 解决了硫系玻璃的脱膜问题。光谱测试结果表明, 该膜层在1.4~2.5 μm和3.5~4.5 μm波段透过率分别为95.8%、96.7%, 满足红外成像系统的使用要求。
Abstract
Based on the film design theory, we design anti-reflective coating for short and medium infrared based on chalcogenide glass. Based on calculation and analysis of material thermal stress, a mixed material M-11 is developed as the connecting layer, the parameters of the deposition process are optimized. and the coating structure is corrected based on its mechanical properties. We solve the problem of stripping of chalcogenide glass. The results of spectral tests show that the transmittance in the bands of 1.4-2.5 μm and 3.5-4.5 μm are 95.8% and 96.7%, respectively, which satisfies the requirement of infrared imaging system.
付秀华, 姜洪妍, 张静, 熊仕富, 郭凯, 孙兵. 基于硫系玻璃的短中波红外减反膜研制[J]. 中国激光, 2017, 44(9): 0903002. Fu Xiuhua, Jiang Hongyan, Zhang Jing, Xiong Shifu, Guo Kai, Sun Bing. Preparation of Short and Medium Wave Infrared Anti-Reflective Coating Based on Chalcogenide Glass[J]. Chinese Journal of Lasers, 2017, 44(9): 0903002.